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Commit cf58f6e6 authored by Parish, Chad's avatar Parish, Chad
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SRIM_outputs/E2RECOIL.txt 0 → 100644
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====== Cu (10) into W =======
SRIM-2013.00
=======================================
Energy transferred to RECOILS
See SRIM Outputs\TDATA.txt for calc. details
=======================================
--------------------------------------------------------------------
Recoil/Damage Calculations made with Kinchin-Pease Estimates
--------------------------------------------------------------------
See file: SRIM Outputs\TDATA.txt for data about the calculation
Ion = Cu Energy = 500 keV
============= TARGET MATERIAL ======================================
Layer 1 : W
Layer Width = 30000.E-01 AAA ;
Layer # 1- Density = 6.338E22 atoms/cm3 = 19.35 g/cm3
Layer # 1- W = 100 Atomic Percent = 100 Mass Percent
====================================================================
Total Ions calculated =500000.00
===========================================================
Table Energy Units are >>>> eV /(Angstrom-Ion) <<<<
===========================================================
DEPTH ENERGY ENERGY
DEPTH from Absorbed
(Ang.) IONS by Recoils
---------- ------------ -----------
300100.E-04 2129.66E-01 2129.66E-01
600100.E-04 2236.76E-01 2236.76E-01
900100.E-04 2343.07E-01 2343.07E-01
120010.E-03 2425.40E-01 2425.40E-01
150010.E-03 2498.98E-01 2498.98E-01
180010.E-03 2586.59E-01 2586.59E-01
210010.E-03 2658.55E-01 2658.55E-01
240010.E-03 2708.42E-01 2708.42E-01
270010.E-03 2779.23E-01 2779.23E-01
300010.E-03 2817.58E-01 2817.58E-01
330010.E-03 2868.24E-01 2868.24E-01
360010.E-03 2916.97E-01 2916.97E-01
390010.E-03 2951.16E-01 2951.16E-01
420010.E-03 2972.83E-01 2972.83E-01
450010.E-03 3017.41E-01 3017.41E-01
480010.E-03 3037.97E-01 3037.97E-01
510010.E-03 3047.76E-01 3047.76E-01
540010.E-03 3022.33E-01 3022.33E-01
570010.E-03 3030.91E-01 3030.91E-01
600010.E-03 3011.34E-01 3011.34E-01
630010.E-03 2979.21E-01 2979.21E-01
660010.E-03 2960.45E-01 2960.45E-01
690010.E-03 2943.66E-01 2943.66E-01
720010.E-03 2907.06E-01 2907.06E-01
750010.E-03 2875.40E-01 2875.40E-01
780010.E-03 2797.28E-01 2797.28E-01
810010.E-03 2772.90E-01 2772.90E-01
840010.E-03 2703.82E-01 2703.82E-01
870010.E-03 2649.86E-01 2649.86E-01
900010.E-03 2600.66E-01 2600.66E-01
930010.E-03 2525.17E-01 2525.17E-01
960010.E-03 2439.26E-01 2439.26E-01
990010.E-03 2356.35E-01 2356.35E-01
102001.E-02 2281.09E-01 2281.09E-01
105001.E-02 2236.22E-01 2236.22E-01
108001.E-02 2166.96E-01 2166.96E-01
111001.E-02 2074.75E-01 2074.75E-01
114001.E-02 2001.98E-01 2001.98E-01
117001.E-02 1906.16E-01 1906.16E-01
120001.E-02 1846.81E-01 1846.81E-01
123001.E-02 1764.04E-01 1764.04E-01
126001.E-02 1682.26E-01 1682.26E-01
129001.E-02 1596.74E-01 1596.74E-01
132001.E-02 1526.03E-01 1526.03E-01
135001.E-02 1455.65E-01 1455.65E-01
138001.E-02 1361.80E-01 1361.80E-01
141001.E-02 1302.40E-01 1302.40E-01
144001.E-02 1247.15E-01 1247.15E-01
147001.E-02 1155.80E-01 1155.80E-01
150001.E-02 1089.28E-01 1089.28E-01
153001.E-02 1030.98E-01 1030.98E-01
156001.E-02 9732.26E-02 9732.26E-02
159001.E-02 9052.29E-02 9052.29E-02
162001.E-02 8491.15E-02 8491.15E-02
165001.E-02 7893.66E-02 7893.66E-02
168001.E-02 7354.31E-02 7354.31E-02
171001.E-02 6833.12E-02 6833.12E-02
174001.E-02 6376.11E-02 6376.11E-02
177001.E-02 5862.19E-02 5862.19E-02
180001.E-02 5376.25E-02 5376.25E-02
183001.E-02 5042.10E-02 5042.10E-02
186001.E-02 4654.03E-02 4654.03E-02
189001.E-02 4238.01E-02 4238.01E-02
192001.E-02 3901.62E-02 3901.62E-02
195001.E-02 3526.52E-02 3526.52E-02
198001.E-02 3242.64E-02 3242.64E-02
201001.E-02 2967.93E-02 2967.93E-02
204001.E-02 2706.03E-02 2706.03E-02
207001.E-02 2450.60E-02 2450.60E-02
210001.E-02 2241.82E-02 2241.82E-02
213001.E-02 2078.69E-02 2078.69E-02
216001.E-02 1861.65E-02 1861.65E-02
219001.E-02 1613.01E-02 1613.01E-02
222001.E-02 1496.43E-02 1496.43E-02
225001.E-02 1333.61E-02 1333.61E-02
228001.E-02 1177.70E-02 1177.70E-02
231001.E-02 1054.08E-02 1054.08E-02
234001.E-02 9312.44E-03 9312.44E-03
237001.E-02 8379.08E-03 8379.08E-03
240001.E-02 7235.90E-03 7235.90E-03
243001.E-02 6600.19E-03 6600.19E-03
246001.E-02 5762.14E-03 5762.14E-03
249001.E-02 5167.85E-03 5167.85E-03
252001.E-02 4536.48E-03 4536.48E-03
255001.E-02 3961.96E-03 3961.96E-03
258001.E-02 3378.49E-03 3378.49E-03
261001.E-02 2997.31E-03 2997.31E-03
264001.E-02 2609.71E-03 2609.71E-03
267001.E-02 2297.29E-03 2297.29E-03
270001.E-02 2003.61E-03 2003.61E-03
273001.E-02 1677.48E-03 1677.48E-03
276001.E-02 1402.40E-03 1402.40E-03
279001.E-02 1249.08E-03 1249.08E-03
282001.E-02 1107.91E-03 1107.91E-03
285001.E-02 9501.43E-04 9501.43E-04
288001.E-02 7618.05E-04 7618.05E-04
291001.E-02 6951.09E-04 6951.09E-04
294001.E-02 5689.45E-04 5689.45E-04
297001.E-02 4804.92E-04 4804.92E-04
300001.E-02 3837.44E-04 3837.44E-04
SRIM_outputs/IONIZ.txt 0 → 100644
View file @ cf58f6e6
====== Cu (10) into W =======
SRIM-2013.00
========================================
Ion and Recoil IONIZATION
See SRIM Outputs\TDATA.txt for details
========================================
--------------------------------------------------------------------
Recoil/Damage Calculations made with Kinchin-Pease Estimates
--------------------------------------------------------------------
See file : SRIM Outputs\TDATA.txt for calculation data
Ion = Cu Energy = 500 keV
============= TARGET MATERIAL ======================================
Layer 1 : W
Layer Width = 30000.E-01 A ;
Layer # 1- Density = 6.338E22 atoms/cm3 = 19.35 g/cm3
Layer # 1- W = 100 Atomic Percent = 100 Mass Percent
====================================================================
Total Ions calculated =500000.00
===============================================================
Ionization Energy Units are >>>> eV /(Angstrom-Ion) <<<<
===============================================================
TARGET IONIZ. IONIZ.
DEPTH by by
(Ang) IONS RECOILS
----------- ----------- -----------
300100.E-04 7711.33E-02 4380.07E-02
600100.E-04 7855.13E-02 5345.31E-02
900100.E-04 7955.06E-02 5654.44E-02
120010.E-03 8044.76E-02 5770.36E-02
150010.E-03 8103.27E-02 5930.46E-02
180010.E-03 8169.26E-02 6141.08E-02
210010.E-03 8192.90E-02 6276.98E-02
240010.E-03 8225.87E-02 6382.04E-02
270010.E-03 8232.34E-02 6543.12E-02
300010.E-03 8234.42E-02 6590.56E-02
330010.E-03 8197.72E-02 6731.36E-02
360010.E-03 8156.07E-02 6786.61E-02
390010.E-03 8116.61E-02 6890.03E-02
420010.E-03 8047.03E-02 6889.15E-02
450010.E-03 7984.81E-02 6979.19E-02
480010.E-03 7883.63E-02 7021.54E-02
510010.E-03 7752.09E-02 7028.16E-02
540010.E-03 7614.14E-02 6932.40E-02
570010.E-03 7495.07E-02 6987.89E-02
600010.E-03 7326.43E-02 6862.40E-02
630010.E-03 7177.48E-02 6826.33E-02
660010.E-03 6995.44E-02 6715.93E-02
690010.E-03 6815.25E-02 6690.29E-02
720010.E-03 6638.27E-02 6595.49E-02
750010.E-03 6426.21E-02 6516.16E-02
780010.E-03 6225.66E-02 6317.52E-02
810010.E-03 6038.46E-02 6245.01E-02
840010.E-03 5822.86E-02 6071.70E-02
870010.E-03 5612.81E-02 5928.18E-02
900010.E-03 5408.25E-02 5832.51E-02
930010.E-03 5175.80E-02 5649.50E-02
960010.E-03 4957.95E-02 5424.76E-02
990010.E-03 4746.95E-02 5249.25E-02
102001.E-02 4553.27E-02 5028.87E-02
105001.E-02 4338.46E-02 4946.09E-02
108001.E-02 4132.83E-02 4783.95E-02
111001.E-02 3920.79E-02 4564.99E-02
114001.E-02 3716.87E-02 4410.12E-02
117001.E-02 3514.90E-02 4177.04E-02
120001.E-02 3327.45E-02 4042.71E-02
123001.E-02 3144.42E-02 3862.08E-02
126001.E-02 2962.65E-02 3665.87E-02
129001.E-02 2785.45E-02 3476.66E-02
132001.E-02 2616.87E-02 3306.66E-02
135001.E-02 2457.14E-02 3147.64E-02
138001.E-02 2294.98E-02 2944.24E-02
141001.E-02 2147.40E-02 2795.19E-02
144001.E-02 2007.84E-02 2682.17E-02
147001.E-02 1860.98E-02 2491.82E-02
150001.E-02 1734.07E-02 2324.79E-02
153001.E-02 1612.58E-02 2202.57E-02
156001.E-02 1489.55E-02 2078.76E-02
159001.E-02 1381.70E-02 1926.47E-02
162001.E-02 1278.22E-02 1799.20E-02
165001.E-02 1179.26E-02 1673.20E-02
168001.E-02 1085.36E-02 1558.12E-02
171001.E-02 9999.05E-03 1435.01E-02
174001.E-02 9159.85E-03 1348.77E-02
177001.E-02 8359.39E-03 1228.72E-02
180001.E-02 7620.29E-03 1125.04E-02
183001.E-02 6961.51E-03 1052.67E-02
186001.E-02 6361.54E-03 9725.55E-03
189001.E-02 5735.02E-03 8858.12E-03
192001.E-02 5212.18E-03 8105.28E-03
195001.E-02 4709.36E-03 7317.71E-03
198001.E-02 4235.45E-03 6736.32E-03
201001.E-02 3835.24E-03 6142.68E-03
204001.E-02 3446.41E-03 5560.68E-03
207001.E-02 3114.15E-03 5089.34E-03
210001.E-02 2768.47E-03 4583.52E-03
213001.E-02 2509.38E-03 4295.63E-03
216001.E-02 2251.56E-03 3812.39E-03
219001.E-02 1973.65E-03 3293.76E-03
222001.E-02 1765.04E-03 3071.34E-03
225001.E-02 1561.93E-03 2702.64E-03
228001.E-02 1364.03E-03 2385.75E-03
231001.E-02 1198.65E-03 2153.26E-03
234001.E-02 1074.00E-03 1874.29E-03
237001.E-02 9470.18E-04 1694.84E-03
240001.E-02 8276.16E-04 1461.10E-03
243001.E-02 7273.97E-04 1342.79E-03
246001.E-02 6410.84E-04 1158.34E-03
249001.E-02 5577.57E-04 1044.06E-03
252001.E-02 4912.78E-04 8989.98E-04
255001.E-02 4246.46E-04 7909.59E-04
258001.E-02 3646.03E-04 6747.25E-04
261001.E-02 3112.27E-04 5929.84E-04
264001.E-02 2718.46E-04 5240.42E-04
267001.E-02 2340.94E-04 4578.88E-04
270001.E-02 2036.31E-04 3979.02E-04
273001.E-02 1714.91E-04 3329.09E-04
276001.E-02 1486.10E-04 2791.19E-04
279001.E-02 1262.19E-04 2414.35E-04
282001.E-02 1120.73E-04 2212.55E-04
285001.E-02 9550.64E-05 1925.20E-04
288001.E-02 7960.84E-05 1449.11E-04
291001.E-02 6849.23E-05 1353.53E-04
294001.E-02 5682.15E-05 1130.06E-04
297001.E-02 4591.61E-05 9246.43E-05
300001.E-02 3304.15E-05 8146.41E-05
SRIM_outputs/LATERAL.txt 0 → 100644
View file @ cf58f6e6
====== Cu (10) into W =======
SRIM-2013.00
=====================================
LATERAL SPREAD OF IONS
See SRIM Outputs\TDATA.txt for calc. details
Ì===================================Ê===================================
NOTE : The Projected LATERAL Spread is based on a projection on a
plane- just the way the XY or XZ displays look on the screen. The
Lateral Projected Range is defined as the average of the absolute
values of the projected lateral displacements from the X-axis.
One use of this range: If a mask covers half of a target, the lateral
range is the distance under the mask where the concentration drops to
25% (at the mask edge the concentration= 50% of the uniform value).
The Radial Range is the mean radial displacement range from the
X-axis a-uming cylindrical symmetry.
========================================================================
--------------------------------------------------------------------
Recoil/Damage Calculations made with Kinchin-Pease Estimates
--------------------------------------------------------------------
See file: SRIM Outputs\TDATA.txt for data about the calculation
Ion = Cu Energy = 500 keV
Total Ions calculated =500000.00
============= TARGET MATERIAL ======================================
Layer 1 : W
Layer Width = 30000.E-01 AAA ;
Layer # 1- Density = 6.338E22 atoms/cm3 = 19.35 g/cm3
Layer # 1- W = 100 Atomic Percent = 100 Mass Percent
====================================================================
Ion Average Range = 107434.E-02 A Straggling = 561624.E-03 A
Ion Lateral Range = 492256.E-03 A Straggling = 624010.E-03 A
Ion Radial Range = 774750.E-03 A Straggling = 425142.E-03 A
====================================================================
LATERAL Projected LATERAL Radial
TARGET PROJ.RANGE Straggling RADIAL Straggling
DEPTH (A) (Angstroms) (Angstroms) (Angstroms) (Angstroms)
------------ ------------- ------------- ------------- -------------
3001000.E-05 42498871.E-05 55813627.E-05 68028750.E-05 42293781.E-05
6001000.E-05 44779291.E-05 58700916.E-05 69250392.E-05 42008934.E-05
9001000.E-05 44741022.E-05 57857598.E-05 70326245.E-05 42268025.E-05
1200100.E-04 44692643.E-05 58171857.E-05 68747381.E-05 42573272.E-05
1500100.E-04 45231761.E-05 58765844.E-05 71183249.E-05 43285351.E-05
1800100.E-04 44897201.E-05 58305212.E-05 70029859.E-05 42574605.E-05
2100100.E-04 45176850.E-05 58858217.E-05 70617718.E-05 42931404.E-05
2400100.E-04 45209459.E-05 58341913.E-05 71920399.E-05 41949648.E-05
2700100.E-04 45848357.E-05 59381194.E-05 71566936.E-05 42494710.E-05
3000100.E-04 45112756.E-05 58654646.E-05 71538064.E-05 43475030.E-05
3300100.E-04 45051246.E-05 58083172.E-05 71264595.E-05 41709745.E-05
3600100.E-04 45902914.E-05 59248419.E-05 71874910.E-05 42562964.E-05
3900100.E-04 45755527.E-05 59045404.E-05 71989465.E-05 42239696.E-05
4200100.E-04 47034169.E-05 60348681.E-05 72417361.E-05 42472989.E-05
4500100.E-04 46054278.E-05 59514828.E-05 72009194.E-05 42738728.E-05
4800100.E-04 46729144.E-05 60008907.E-05 73512870.E-05 42403082.E-05
5100100.E-04 47290415.E-05 60612427.E-05 73458014.E-05 42660295.E-05
5400100.E-04 47509325.E-05 61137319.E-05 74639046.E-05 43266854.E-05
5700100.E-04 47458525.E-05 60720251.E-05 74688982.E-05 43027729.E-05
6000100.E-04 47540921.E-05 60497497.E-05 74430864.E-05 42650919.E-05
6300100.E-04 47743627.E-05 61104343.E-05 74949036.E-05 42302734.E-05
6600100.E-04 47744080.E-05 60948364.E-05 74925722.E-05 42304668.E-05
6900100.E-04 48629304.E-05 61636522.E-05 75980958.E-05 42210036.E-05
7200100.E-04 47882774.E-05 61032696.E-05 75512074.E-05 42670356.E-05
7500100.E-04 48319398.E-05 61495210.E-05 76084707.E-05 42168931.E-05
7800100.E-04 48595783.E-05 62255622.E-05 76493175.E-05 42766668.E-05
8100100.E-04 49266945.E-05 62515046.E-05 77219064.E-05 42886323.E-05
8400100.E-04 49589685.E-05 63016374.E-05 77476328.E-05 42810545.E-05
8700100.E-04 49296354.E-05 62321383.E-05 78034486.E-05 42161369.E-05
9000100.E-04 49474504.E-05 62596050.E-05 77957629.E-05 42368113.E-05
9300100.E-04 49684571.E-05 62828970.E-05 78138804.E-05 42583721.E-05
9600100.E-04 49787266.E-05 62943904.E-05 78245685.E-05 42382091.E-05
9900100.E-04 49574506.E-05 62760191.E-05 78262520.E-05 42192288.E-05
1020010.E-03 49434272.E-05 62580820.E-05 78245204.E-05 42293217.E-05
1050010.E-03 49582142.E-05 62807002.E-05 77593872.E-05 42278078.E-05
1080010.E-03 50682163.E-05 63514548.E-05 79474611.E-05 42156121.E-05
1110010.E-03 49952520.E-05 62899200.E-05 78793340.E-05 42986982.E-05
1140010.E-03 50496854.E-05 63589764.E-05 79402100.E-05 42419919.E-05
1170010.E-03 50092554.E-05 63057489.E-05 78958042.E-05 41992484.E-05
1200010.E-03 50249113.E-05 63367005.E-05 79367448.E-05 42828997.E-05
1230010.E-03 50305933.E-05 63506744.E-05 79290060.E-05 42233968.E-05
1260010.E-03 50592200.E-05 63795095.E-05 79418634.E-05 42745990.E-05
1290010.E-03 50620851.E-05 63672356.E-05 80328270.E-05 42164805.E-05
1320010.E-03 50669434.E-05 63395841.E-05 79486829.E-05 41367535.E-05
1350010.E-03 50338384.E-05 63272825.E-05 79556746.E-05 42441034.E-05
1380010.E-03 51092828.E-05 64257041.E-05 80240753.E-05 42945593.E-05
1410010.E-03 50018631.E-05 63180997.E-05 79909432.E-05 42247827.E-05
1440010.E-03 51201747.E-05 64300668.E-05 80313520.E-05 42465583.E-05
1470010.E-03 50449404.E-05 63405159.E-05 79806621.E-05 42236812.E-05
1500010.E-03 50824807.E-05 63701294.E-05 80035916.E-05 42488607.E-05
1530010.E-03 50387666.E-05 63250738.E-05 79886293.E-05 42438429.E-05
1560010.E-03 51134206.E-05 64121737.E-05 80798758.E-05 42081148.E-05
1590010.E-03 50477481.E-05 63428220.E-05 81219291.E-05 42314661.E-05
1620010.E-03 51037376.E-05 63799953.E-05 80921510.E-05 42085215.E-05
1650010.E-03 50768422.E-05 64094159.E-05 80231699.E-05 42617461.E-05
1680010.E-03 51797203.E-05 65099554.E-05 81347920.E-05 42487476.E-05
1710010.E-03 52232748.E-05 65291538.E-05 81544454.E-05 42617229.E-05
1740010.E-03 51872266.E-05 64779602.E-05 81748993.E-05 42389655.E-05
1770010.E-03 51039834.E-05 64219750.E-05 80991054.E-05 43225942.E-05
1800010.E-03 50677828.E-05 63920228.E-05 80180949.E-05 42810947.E-05
1830010.E-03 51864386.E-05 64671194.E-05 81006194.E-05 42094843.E-05
1860010.E-03 51068510.E-05 64396798.E-05 80111248.E-05 42464522.E-05
1890010.E-03 50740606.E-05 64191775.E-05 80487017.E-05 42056184.E-05
1920010.E-03 51146800.E-05 64312137.E-05 80664826.E-05 41317065.E-05
1950010.E-03 52752414.E-05 66256028.E-05 81733329.E-05 42276372.E-05
1980010.E-03 51140300.E-05 64105180.E-05 80712130.E-05 41544613.E-05
2010010.E-03 51563379.E-05 64849145.E-05 80292277.E-05 41552918.E-05
2040010.E-03 50756969.E-05 63522069.E-05 80032614.E-05 41563083.E-05
2070010.E-03 50449164.E-05 63369818.E-05 79860244.E-05 42056075.E-05
2100010.E-03 51253940.E-05 64119331.E-05 81506167.E-05 41961486.E-05
2130010.E-03 52139255.E-05 64181200.E-05 80527747.E-05 40946206.E-05
2160010.E-03 51328692.E-05 64324682.E-05 80694370.E-05 42542723.E-05
2190010.E-03 51724953.E-05 65111035.E-05 82299914.E-05 43029871.E-05
2220010.E-03 50571300.E-05 63542747.E-05 79291999.E-05 41474443.E-05
2250010.E-03 50744585.E-05 62914586.E-05 81018132.E-05 41345908.E-05
2280010.E-03 50281678.E-05 62420368.E-05 79770007.E-05 40925452.E-05
2310010.E-03 49739259.E-05 62576094.E-05 79243447.E-05 41365189.E-05
2340010.E-03 49765825.E-05 63370028.E-05 78121221.E-05 41586070.E-05
2370010.E-03 52315993.E-05 65409035.E-05 80298556.E-05 41346005.E-05
2400010.E-03 50749549.E-05 63278816.E-05 78909488.E-05 41416247.E-05
2430010.E-03 49378477.E-05 62914094.E-05 80882745.E-05 42061444.E-05
2460010.E-03 47877458.E-05 60776769.E-05 78698840.E-05 41583177.E-05
2490010.E-03 48616508.E-05 60611672.E-05 79829681.E-05 40991302.E-05
2520010.E-03 49014060.E-05 62290709.E-05 80718102.E-05 41847822.E-05
2550010.E-03 53380271.E-05 66603363.E-05 79990132.E-05 41522470.E-05
2580010.E-03 49533846.E-05 61787635.E-05 79673099.E-05 40350913.E-05
2610010.E-03 50587450.E-05 64550242.E-05 78213691.E-05 42789757.E-05
2640010.E-03 49529942.E-05 61542831.E-05 79871632.E-05 40389995.E-05
2670010.E-03 51557550.E-05 64037645.E-05 80174085.E-05 38403447.E-05
2700010.E-03 47300472.E-05 58234558.E-05 74477511.E-05 37001275.E-05
2730010.E-03 52107373.E-05 65716019.E-05 81398014.E-05 42136056.E-05
2760010.E-03 50561029.E-05 62115919.E-05 78345514.E-05 40524106.E-05
2790010.E-03 52104240.E-05 64200447.E-05 81133796.E-05 40151954.E-05
2820010.E-03 45978601.E-05 58879190.E-05 75732420.E-05 41043593.E-05
2850010.E-03 51487291.E-05 62614606.E-05 80926359.E-05 41858097.E-05
2880010.E-03 48224043.E-05 59205913.E-05 79632532.E-05 40905973.E-05
2910010.E-03 44958674.E-05 57613668.E-05 73567279.E-05 35812983.E-05
2940010.E-03 45228952.E-05 57928491.E-05 71098897.E-05 36232057.E-05
2970010.E-03 50479192.E-05 64951818.E-05 81488388.E-05 42549834.E-05
3000010.E-03 60417397.E-05 76793217.E-05 85473312.E-05 49932987.E-05
SRIM_outputs/NOVAC.txt 0 → 100644
View file @ cf58f6e6
====== Cu (10) into W =======
SRIM-2013.00
=========================================
Replacement Collisions
See SRIM Outputs\TDATA.txt for calc. details
=========================================
--------------------------------------------------------------------
Recoil/Damage Calculations made with Kinchin-Pease Estimates
--------------------------------------------------------------------
There are NO Replacement Collisions calculated.
You must execute a full TRIM cascade calculation for these.
SRIM_outputs/PHONON.txt 0 → 100644
View file @ cf58f6e6
====== Cu (10) into W =======
SRIM-2013.00
========================================
Ion and Recoil PHONONS
See SRIM Outputs\TDATA.txt for calc. details
========================================
--------------------------------------------------------------------
Recoil/Damage Calculations made with Kinchin-Pease Estimates
--------------------------------------------------------------------
See file : SRIM Outputs\TDATA.txt calculation data
Ion = Cu Energy = 500 keV
============= TARGET MATERIAL ======================================
Layer 1 : W
Layer Width = 3.E+03 AAA ;
Layer # 1- Density = 6.338E22 atoms/cm3 = 19.35 g/cm3
Layer # 1- W = 100 Atomic Percent = 100 Mass Percent
====================================================================
Total Ions calculated =500000.00
========================================================
Table Units are >>>> Phonons /(Angstrom-Ion) <<<<
========================================================
DEPTH PHONONS PHONONS
(Ang.) by ION by RECOILS
----------- ----------- -----------
300100.E-04 173429.E-05 139454.E-03
600100.E-04 184804.E-05 171252.E-03
900100.E-04 196084.E-05 181559.E-03
120010.E-03 205723.E-05 186636.E-03
150010.E-03 214713.E-05 192823.E-03
180010.E-03 223421.E-05 199697.E-03
210010.E-03 231740.E-05 205342.E-03
240010.E-03 239354.E-05 209979.E-03
270010.E-03 246503.E-05 215604.E-03
300010.E-03 253101.E-05 218441.E-03
330010.E-03 258859.E-05 223359.E-03
360010.E-03 264558.E-05 226208.E-03
390010.E-03 269131.E-05 229979.E-03
420010.E-03 274764.E-05 231457.E-03
450010.E-03 279501.E-05 235017.E-03
480010.E-03 283018.E-05 236973.E-03
510010.E-03 285520.E-05 237638.E-03
540010.E-03 287440.E-05 235973.E-03
570010.E-03 289225.E-05 237914.E-03
600010.E-03 290108.E-05 235051.E-03
630010.E-03 290688.E-05 233949.E-03
660010.E-03 290413.E-05 231615.E-03
690010.E-03 289888.E-05 231132.E-03
720010.E-03 288238.E-05 228241.E-03
750010.E-03 285352.E-05 225963.E-03
780010.E-03 283397.E-05 220268.E-03
810010.E-03 281145.E-05 218148.E-03
840010.E-03 276805.E-05 212884.E-03
870010.E-03 274434.E-05 208804.E-03
900010.E-03 269840.E-05 205507.E-03
930010.E-03 263058.E-05 199481.E-03
960010.E-03 258232.E-05 192837.E-03
990010.E-03 253317.E-05 187053.E-03
102001.E-02 248283.E-05 180438.E-03
105001.E-02 242670.E-05 176917.E-03
108001.E-02 236159.E-05 171888.E-03
111001.E-02 229145.E-05 164523.E-03
114001.E-02 222122.E-05 159228.E-03
117001.E-02 214565.E-05 151505.E-03
120001.E-02 208585.E-05 146720.E-03
123001.E-02 200784.E-05 140614.E-03
126001.E-02 192847.E-05 133992.E-03
129001.E-02 185811.E-05 127440.E-03
132001.E-02 179516.E-05 121687.E-03
135001.E-02 172168.E-05 116168.E-03
138001.E-02 164659.E-05 109363.E-03
141001.E-02 157370.E-05 103932.E-03
144001.E-02 150281.E-05 997382.E-04
147001.E-02 142534.E-05 930275.E-04
150001.E-02 135153.E-05 872376.E-04
153001.E-02 128634.E-05 827293.E-04
156001.E-02 121646.E-05 781255.E-04
159001.E-02 116035.E-05 728693.E-04
162001.E-02 108984.E-05 682768.E-04
165001.E-02 102377.E-05 636032.E-04
168001.E-02 966788.E-06 594217.E-04
171001.E-02 904601.E-06 549432.E-04
174001.E-02 845690.E-06 515313.E-04
177001.E-02 793824.E-06 473316.E-04
180001.E-02 739652.E-06 435333.E-04
183001.E-02 690694.E-06 407566.E-04
186001.E-02 647220.E-06 376891.E-04
189001.E-02 589005.E-06 344036.E-04
192001.E-02 546598.E-06 315481.E-04
195001.E-02 503503.E-06 286214.E-04
198001.E-02 465520.E-06 263966.E-04
201001.E-02 432235.E-06 241579.E-04
204001.E-02 395125.E-06 219258.E-04
207001.E-02 359403.E-06 200710.E-04
210001.E-02 330024.E-06 181250.E-04
213001.E-02 308997.E-06 169744.E-04
216001.E-02 279803.E-06 151514.E-04
219001.E-02 251127.E-06 132148.E-04
222001.E-02 226067.E-06 122263.E-04
225001.E-02 209629.E-06 108841.E-04
228001.E-02 184301.E-06 961101.E-05
231001.E-02 164239.E-06 863326.E-05
234001.E-02 148479.E-06 760610.E-05
237001.E-02 133309.E-06 686561.E-05
240001.E-02 117974.E-06 592776.E-05
243001.E-02 107562.E-06 546263.E-05
246001.E-02 972696.E-07 475376.E-05
249001.E-02 858566.E-07 426149.E-05
252001.E-02 773853.E-07 369567.E-05
255001.E-02 677948.E-07 326327.E-05
258001.E-02 579053.E-07 279625.E-05
261001.E-02 511039.E-07 246575.E-05
264001.E-02 450553.E-07 216080.E-05
267001.E-02 396238.E-07 189238.E-05
270001.E-02 348839.E-07 164474.E-05
273001.E-02 302194.E-07 138182.E-05
276001.E-02 258811.E-07 117491.E-05
279001.E-02 221327.E-07 101061.E-05
282001.E-02 199762.E-07 927852.E-06
285001.E-02 171800.E-07 801582.E-06
288001.E-02 149563.E-07 624170.E-06
291001.E-02 125736.E-07 577465.E-06
294001.E-02 106266.E-07 474761.E-06
297001.E-02 909123.E-08 395414.E-06
300001.E-02 594136.E-08 333680.E-06
SRIM_outputs/RANGE.txt 0 → 100644
View file @ cf58f6e6
====== Cu (10) into W =======
SRIM-2013.00
==================================================
ION and final RECOIL ATOM Distributions
See SRIM Outputs\TDATA.txt for calculation details
==================================================
--------------------------------------------------------------------
Recoil/Damage Calculations made with Kinchin-Pease Estimates
--------------------------------------------------------------------
----------------------------------------------------------------
There are NO RECOILS unless a full TRIM calculation is made.
----------------------------------------------------------------
See file : SRIM Outputs\TDATA.txt for details of calculation
Ion = Cu Energy = 500 keV
============= TARGET MATERIAL ======================================
Layer 1 : W
Layer Width = 3.E+03 A Layer # 1- Density = 6.338E22 atoms/cm3 = 19.35 g/cm3
Layer # 1- W = 100 Atomic Percent = 100 Mass Percent
====================================================================
Total Ions calculated =500000.00
Ion Average Range = 107.4E+01 A Straggling = 561.6E+00 A
Ion Lateral Range = 492.3E+00 A Straggling = 624.0E+00 A
Ion Radial Range = 774.8E+00 A Straggling = 425.1E+00 A
====================================================================
Transmitted Ions =513; Backscattered Ions =29707
(These are not included in Skewne- and Kurtosis below.)
Range Skewne- = 000.3809 &= [-(X-Rp)^3]/[N*Straggle^3]
Range Kurtosis = 002.6649 &= [-(X-Rp)^4]/[N*Straggle^4]
Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
Table Distribution Units are >>> (Atoms/cm3) / (Atoms/cm2) <<<
=================================================================
DEPTH Cu Recoil
(Ang.) Ions Distribution
----------- ---------- ------------
300100.E-04 7.3333E+03 0.0000E+00
600100.E-04 1.4473E+04 0.0000E+00
900100.E-04 1.8866E+04 0.0000E+00
120010.E-03 2.1313E+04 0.0000E+00
150010.E-03 2.4466E+04 0.0000E+00
180010.E-03 2.6447E+04 0.0000E+00
210010.E-03 2.9461E+04 0.0000E+00
240010.E-03 3.0634E+04 0.0000E+00
270010.E-03 3.4035E+04 0.0000E+00
300010.E-03 3.5935E+04 0.0000E+00
330010.E-03 3.7109E+04 0.0000E+00
360010.E-03 3.9803E+04 0.0000E+00
390010.E-03 4.1136E+04 0.0000E+00
420010.E-03 4.2603E+04 0.0000E+00
450010.E-03 4.4824E+04 0.0000E+00
480010.E-03 4.7538E+04 0.0000E+00
510010.E-03 4.8871E+04 0.0000E+00
540010.E-03 5.1425E+04 0.0000E+00
570010.E-03 5.0572E+04 0.0000E+00
600010.E-03 5.2691E+04 0.0000E+00
630010.E-03 5.5651E+04 0.0000E+00
660010.E-03 5.6324E+04 0.0000E+00
690010.E-03 5.6890E+04 0.0000E+00
720010.E-03 5.7277E+04 0.0000E+00
750010.E-03 5.8703E+04 0.0000E+00
780010.E-03 5.9110E+04 0.0000E+00
810010.E-03 6.0956E+04 0.0000E+00
840010.E-03 6.0496E+04 0.0000E+00
870010.E-03 6.2262E+04 0.0000E+00
900010.E-03 6.2402E+04 0.0000E+00
930010.E-03 6.0896E+04 0.0000E+00
960010.E-03 6.1089E+04 0.0000E+00
990010.E-03 6.1803E+04 0.0000E+00
102001.E-02 6.1669E+04 0.0000E+00
105001.E-02 6.2036E+04 0.0000E+00
108001.E-02 6.1829E+04 0.0000E+00
111001.E-02 6.0829E+04 0.0000E+00
114001.E-02 6.0156E+04 0.0000E+00
117001.E-02 5.9450E+04 0.0000E+00
120001.E-02 5.9183E+04 0.0000E+00
123001.E-02 5.7230E+04 0.0000E+00
126001.E-02 5.6384E+04 0.0000E+00
129001.E-02 5.3851E+04 0.0000E+00
132001.E-02 5.4158E+04 0.0000E+00
135001.E-02 5.3118E+04 0.0000E+00
138001.E-02 5.1952E+04 0.0000E+00
141001.E-02 5.1125E+04 0.0000E+00
144001.E-02 4.8285E+04 0.0000E+00
147001.E-02 4.7438E+04 0.0000E+00
150001.E-02 4.5924E+04 0.0000E+00
153001.E-02 4.4084E+04 0.0000E+00
156001.E-02 4.2750E+04 0.0000E+00
159001.E-02 4.0856E+04 0.0000E+00
162001.E-02 3.9356E+04 0.0000E+00
165001.E-02 3.6942E+04 0.0000E+00
168001.E-02 3.6589E+04 0.0000E+00
171001.E-02 3.3121E+04 0.0000E+00
174001.E-02 3.1928E+04 0.0000E+00
177001.E-02 3.0734E+04 0.0000E+00
180001.E-02 2.9274E+04 0.0000E+00
183001.E-02 2.7520E+04 0.0000E+00
186001.E-02 2.6093E+04 0.0000E+00
189001.E-02 2.4393E+04 0.0000E+00
192001.E-02 2.2280E+04 0.0000E+00
195001.E-02 2.0940E+04 0.0000E+00
198001.E-02 2.0040E+04 0.0000E+00
201001.E-02 1.8366E+04 0.0000E+00
204001.E-02 1.7440E+04 0.0000E+00
207001.E-02 1.5513E+04 0.0000E+00
210001.E-02 1.4533E+04 0.0000E+00
213001.E-02 1.4573E+04 0.0000E+00
216001.E-02 1.2733E+04 0.0000E+00
219001.E-02 1.1733E+04 0.0000E+00
222001.E-02 1.0720E+04 0.0000E+00
225001.E-02 1.0107E+04 0.0000E+00
228001.E-02 8.8333E+03 0.0000E+00
231001.E-02 7.6200E+03 0.0000E+00